Vacuumed Maglev Motor
Magnetic-levitation Motor and its Controller
A rapid annealing equipment involved in RTP and RTA in the semiconductor industry uses a magnetic levitation turntable stably suspend and rotate the wafer to achieve the corresponding process requirements.
The magnetic motor controller can control the motor to run smoothly during normal operation, and the speed fluctuation can achieve the required accuracy within the working range. It also has the function of rotor motion status monitoring, which can alarm in time and generate abnormal logs for subsequent troubleshooting when the equipment fails. Furthermore, It is also equipped with the function of stator temperature monitoring and over-temperature protection, as well as power-off protection and emergency stop functions, which can provide equipment protection in the case of power failure, loss of load, overload, eccentricity, and excessive beating.
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NEUEET (Shenyang) Energy Engineering Technology Co., Ltd Digital Enabling & Industrial Interconnection
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