Motors For SEMI Industry
Motors for the Semiconductor Industry
Equipment involved in RTP and RTA processes in the semiconductor industry, in which a magnetic levitation turntable is used to stably suspend and rotate the wafer to achieve the corresponding process requirements.
The magnetic levitation motor controller contains several functions: controlling the motor to run smoothly during normal operation, and achieving fluctuation can achieve the required accuracy of rotation frequency within the working range; monitoring the motion status of the motor rotor and promptly alarming and generating exception logs for subsequent troubleshooting when the equipment fails. It has the function of stator temperature monitoring and over-temperature protection ; power-off protection and emergency stop functions, which can provide equipment protection in the case of power failure, loss of load, overload, eccentricity, and excessive beating.
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NEUEET (Shenyang) Energy Engineering Technology Co., Ltd Digital Enabling & Industrial Interconnection
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